Scientific Achievement
Direct-write, nanofabrication is achieved from liquid-phase precursor solutions with a scanning transmission electron microscope.
Significance and Impact
Intricately shaped structures with tailored architectures and chemistries can be built using site-specific chemical reactions and controlled material transformations
Research Details
- A custom scan-control system was interfaced with an aberration-corrected STEM for nanolithographic patterning from a liquid phase organometallic solution contained within a liquid cell.
- Controlled nanolithographic patterning was used to deposit Pd nanostructures onto silicon nitride membranes.
- The influence of electron dose on the resultant feature size and morphology was determined.
R.R. Unocic et. al., Nanoscale 8, 15581 (2016).
